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This specification was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee
originally published in 1990
本仕様に記述されるマーキングシンボルは，
SEMI M1 — Specifications for Polished Single Crystal Silicon Wafers
OC（オリエンテーションコーナ）により識別していた情報に加え，基板ごとのID等の情報を加えることができる。
F02200 - SEMI F22 - Guide for Bulk and Specialty Gas Distribution Systems Revision:SEMI F22-1102 - Superseded This specification was technically approvedThis Standard was technically approved by the Facilities Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in May 2018; originally published in 1997; previously published August 2012. This reference Document is intended to outline for the user the common systems configurations, components, and subcomponents of